Multi‐Material Strain Mapping with Scanning Reflectance Anisotropy Microscopy

نویسندگان

چکیده

Strain-engineering of materials encompasses significant elastic deformation and leads to breaking the lattice symmetry as a consequence emergence optical anisotropy. However, capability image map local strain fields by microscopy is currently limited specific materials. Here, broadband scanning reflectance anisotropy microscope phase-sensitive multi-material platform for mapping introduced. The produces hyperspectral images with diffraction-limited sub-micron resolution near-normal incidence ellipsometric response sample, which related means elasto-optic effect. Cutting edge sensitivity demonstrated using variety materials, such metasurfaces, semiconductors, metals. versatility method study simple measurements opens up possibility carry out non-destructive mechanical characterization components, wearable electronics semiconductor devices.

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ژورنال

عنوان ژورنال: Advanced Functional Materials

سال: 2023

ISSN: ['1616-301X', '1616-3028']

DOI: https://doi.org/10.1002/adfm.202302179